2

Micromachined membrane particle filters

Year:
1999
Language:
english
File:
PDF, 2.81 MB
english, 1999
14

A MEMS thermopneumatic silicone rubber membrane valve

Year:
1998
Language:
english
File:
PDF, 868 KB
english, 1998
20

REVIEW: MEMS and Its Applications for Flow Control

Year:
1996
Language:
english
File:
PDF, 1.83 MB
english, 1996
30

MICRO-ELECTRO-MECHANICAL-SYSTEMS (MEMS) AND FLUID FLOWS

Year:
1998
Language:
english
File:
PDF, 1.06 MB
english, 1998